美国BROOKSSLA5850S气体质量流量控制器
详细描述
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BROOKS SLA5850S
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【各项技术参数】
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SLA5800 Series: Digital Thermal Mass Flow Meter/Flow Co**oller, Elastomer Seals
Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and co**ol products offer unparalleled fle**bility and performance. They offer faster response, better accuracy and improved co**ol over traditional analog dev**s. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These dev**s are globally approved for use in a variety of serv** areas.
流量范围：3sccm-30slpm 精度：1% Rate or 0.7% Rate 0.2% FS 压力：300bar 4500psig 温度：65℃ 150F 信号：0-5V 4-20mA RS-485
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